Vendor: CDE (Creative Design Engineering Inc.)
Model: ResMap178
Purpose: Instrument for precise measurement of the sheet resistivity of a conductive media (metal and semiconductor applications).
Equipment Description:
The CDE-ResMap178 is a semi-automatic 4-point probe tool to measure the sheet resistance of a thin film or bulk wafer. The sample is manually loaded into the tool then measurements are performed automatically through a selected recipe.
System Features:
- Manual load wafer handing
- 2″-8″ round wafer size
- 1 second per site typical measurement time
- 2 mΩ/□ - 5 MΩ/□ measurement range
- <0.02% Repeatability (one sigma)
- <0.05% (using NIST traceable ResCal standards) accuracy
- 1.5 mm minimum edge exclusion
- Plotting function in ResMap tool or data can be exported (e.g. Excel)
