Vendor: Edwards Vacuum
Model: nEXT300D Turbo Pumping Station
Purpose: Used to establish and maintain high-vacuum conditions for semiconductor processing tools, load locks, and research vacuum systems.
Equipment description:
The TSC4F0002 is a turbo-molecular pumping station centered around the Edwards nEXT300D high-vacuum turbo pump. This system is designed to provide a clean, oil-free high-vacuum environment suitable for sensitive semiconductor and research applications. The turbo pump features a DN 100 ISO-K high-vacuum flange and provides a nominal pumping speed of ~300 L/s for N₂. The station includes an integrated backing pump and control module for coordinated pump-down and stable vacuum operation. The unit operates from single-phase 220–240 V, 50/60 Hz electrical power.
System features and options:
- Edwards nEXT300D turbo-molecular pump
- Nominal pumping speed: ~300 L/s (N₂)
- DN 100 ISO-K high-vacuum flange interface
- Integrated backing (roughing) pump and shared controller
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Clean, oil-free pumping path suitable for contamination-sensitive environments
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Capable of high-vacuum operation in the 10⁻⁶ to 10⁻⁸ Torr range (system-dependent)
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Suitable for load locks, small process chambers, R&D vacuum applications
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Powered by 1-phase 220–240 V, 50/60 Hz, compatible with standard lab utility service
