IBSS Group Inc. GV10x DS asher

Vendor: ibss group

Model: GV10x DS Asher

Purpose: Removal of surface contamination from samples for transmission electron microscopy (TEM) and scanning electron microscopy (SEM)

Equipment description:

The GV10x DS Asher uses a downstream plasma process to remove carbon and hydrocarbon contamination from electron microscopy samples.  The downstream plasma process enables chemical cleaning of samples and surfaces with virtually zero ion damage (very low KE process).

System features:

  • Inductively coupled plasma (ICP) source
  • Downstream plasma - no sample heating or sputtering
  • Plasma cleaning cycles less than 5 minutes