Vendor: Zeiss
Model: AURIGA 40 scanning electron microscope (SEM)/focused ion beam (FIB)
Purpose: Sample preparation and precision micro-milling of various solid materials for transmission electron microscopy (TEM)
Equipment description:
The AURIGA 40 SEM/FIB is a field emission scanning electron microscope, equipped with a focused ion beam column for localized etching of solid samples. This system is ideal for micro-scale patterned etching and preparation of lamellas for TEM microscopy.
System features:
- Zeiss GEMINI electron column
- SEM resolution of: 1.9 nm @ 1 kV / 1.0 nm @ 15kV
- Orsay Physics Cobra Ga ion column
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Detectors:
- InLens
- Secondary electrons secondary ions (SESI)
- Energy selective backscattered (EsB)
- NTS backscattered electrons (BSD)
- Scanning transmission electron micrscope (STEM)
- 5-channel gas injection (Pt, C, F, H2O, SiO2)
- Charge compensation
- Micromanipulator
- Fibics NanoPatterning and Vizualization Engine (NVPE)