Vendor: OEG
Model: MR200
Purpose: Precision manual dicing of crystalline substrates
Equipment description:
The OEG MR 200 diamond scriber is a tool to facilitate cutting crystalline materials such as silicon or sapphire. The tool consists of a manual stage with X-Y-θ adjustment with digital micrometers for X and Y directions, a vacuum wafer chuck to hold the sample and an electromagnetically actuated scriber tip. A microscope or videocamera may be used to enable precise scriber placement.
System features and options:
- Video camera with computer display of image and crosshairs
OEG diamond scriber
OEG diamond tip
