4-point probe [CDE-4pp]

Vendor: CDE (Creative Design Engineering Inc.)

Model: ResMap178

Purpose: Instrument for precise measurement of the sheet resistivity of a conductive media (metal and semiconductor applications).

Equipment wiki link

Equipment Description:

The CDE-ResMap178 is a semi-automatic 4-point probe tool to measure the sheet resistance of a thin film or bulk wafer. The sample is manually loaded into the tool then measurements are performed automatically through a selected recipe.

System Features:

  • Manual load wafer handing
  • 2″-8″ round wafer size
  • 1 second per site typical measurement time
  • 2 mΩ/□ - 5 MΩ/□ measurement range
  • <0.02% Repeatability (one sigma)
  • <0.05% (using NIST traceable ResCal standards) accuracy
  • 1.5 mm minimum edge exclusion
  • Plotting function in ResMap tool or data can be exported (e.g. Excel)

CDE-4pp
CDE-4pp