Vendor: Reynoldstech

Model: Custom

Purpose: Development of E-beam resists

Equipment wiki link

Equipment description:

This wetbench is dedicated to the development of E-beam resists using solvent and mild-base developers. For more information about available processes and disallowed processes, please consult the equipment wiki page.

System feature and options:

  • Deionized (DI) water and nitrogen spray guns
  • Drying rack
  • Peltier cold plate for cold development
  • Cupsink