Vendor: JEOL
Model: JSM-7200F
Purpose: Scanning electron microscopy of semiconductor samples
Equipment description:
The JSM 7200-F is a scanning electron microscope equipped with a Schottky field-emission electron gun. The tool has a number of observation modes and is equipped with versatile imaging software. The large sample exchange chamber can accommodate substrates ranging in size from a few mm up to 4” wafers.
System features:
- Beam voltage range from 500 V to 30 kV
- Working distance up to 2 mm
- Secondary electron imaging with choice of a lower or upper electron detector configuration
- ‘Gentle-beam’ ultra-high resolution imaging mode with up to 2 kV stage bias
- Oxford Energy Dispersive X-ray system with INCA software for comprehensive elemental analysis and mapping
- Retractable Backscattered Electron Detector
