Vendor: Thermo Scientific

Model: 3490M class 100 cleanroom convection oven

Purpose: Baking of various photoresist films

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Equipment description:

This is a class 100 cleanroom convection oven with constant N2 circulation providing optimum temperature uniformity. Two systems protect oven contents against overheating: a programmable temperature controller and a high temperature limit thermostat control. A red status lamp warns of the overtemperature condition. Maximum temperature is 250℃.