Vendor: Thermo Scientific
Model: 3490M class 100 cleanroom convection oven
Purpose: Baking of various photoresist films
This is a class 100 cleanroom convection oven with constant N2 circulation providing optimum temperature uniformity. Two systems protect oven contents against overheating: a programmable temperature controller and a high temperature limit thermostat control. A red status lamp warns of the overtemperature condition. Maximum temperature is 250℃.