Vendor:   Plasma Etch
Model:     PE-50
Purpose:  Plasma cleaning of substrates

Equipment description:

The PLASMAETCH PE-50 plasma cleaner is designed to clean and surface treat a variety of materials by generating an oxygen and/or argon plasma. O2 gas is primarily used for surface treating non-oxidizing materials. The combination of O2/Ar may be used for surface treating oxidizing materials. System is typically used for removal of organics from surfaces or plasma surface activation.

Equipment wiki link

System features and options:

  • 6.5 CFM roughing vacuum pump
  • 400W RF power supply at 50 kHz
  • Computer interface