Vendor: Plasma Etch
Purpose: Plasma cleaning of substrates
The PLASMAETCH PE-50 plasma cleaner is designed to clean and surface treat a variety of materials by generating an oxygen and/or argon plasma. O2 gas is primarily used for surface treating non-oxidizing materials. The combination of O2/Ar may be used for surface treating oxidizing materials. System is typically used for removal of organics from surfaces or plasma surface activation.
System features and options:
- 6.5 CFM roughing vacuum pump
- 400W RF power supply at 50 kHz
- Computer interface