Vendor: Reynoldstech (hood) & Headway Research (spin coaters)
Model: Custom hood equipped with PMW32-PS spinners
Purpose: Spin coating of various photoresist and a restricted variety of routine semiconductor films
This hood contains a pair of general purpose spinners with two hotplates for spinning and baking a variety of photo and E-beam resists. Each spinner is connected to a dedicated controller for programming in the desired spin curve. Separate hotplates facilitate the spinning of complicated resist stacks with multiple baking conditions.
System features and options:
- Variety of spin chucks for holding samples ranging in size from 4 mm pieces up to 150 mm wafers
- Access to fab supplied resists available to users at no additional charge