Spin Coat: Dual general purpose [REYNOLDSTECH-twincoater]

Vendor: Reynoldstech (hood) & Headway Research (spin coaters)

Model: Custom hood equipped with PMW32-PS spinners

Purpose: Spin coating of various photoresist and a restricted variety of routine semiconductor films

Equipment wiki link

Equipment description:

This hood contains a pair of general purpose spinners with two hotplates for spinning and baking a variety of photo and E-beam resists. Each spinner is connected to a dedicated controller for programming in the desired spin curve. Separate hotplates facilitate the spinning of complicated resist stacks with multiple baking conditions.

System features and options:

  • Variety of spin chucks for holding samples ranging in size from 4 mm pieces up to 150 mm wafers
  • Access to fab supplied resists available to users at no additional charge