Vendor: Reynoldstech

Model: Custom

Purpose: Solvent cleaning, metal lift-off, resist stripping and development of photoresists in solvent-based developers

Equipment wiki link

Equipment description:

This wetbench is dedicated to solvent cleaning, metal lift-off, resist stripping and resist development with solvent based developers. It is equipped with a large integrated ultrasonic bath and a sink. For more information about available processes and disallowed processes, please consult the equipment wiki page.

System features and options:

  • Foot-pedal actuated deionized (DI) water gooseneck
  • DI water and nitrogen spray guns
  • Integrated temperature-controlled ultrasonic bath
  • Sink