Purpose: Solvent cleaning, metal lift-off, resist stripping and development of photoresists in solvent-based developers
This wetbench is dedicated to solvent cleaning, metal lift-off, resist stripping and resist development with solvent based developers. It is equipped with a large integrated ultrasonic bath and a sink. For more information about available processes and disallowed processes, please consult the equipment wiki page.
System features and options:
- Foot-pedal actuated deionized (DI) water gooseneck
- DI water and nitrogen spray guns
- Integrated temperature-controlled ultrasonic bath