The SUSS PM5 analytical probe system is intended for the precise analysis of devices fabricated on wafers and substrates measuring up to 150 mm (6″) in diameter. It can be used for DC and HF measurements and is also suitable as a failure analysis tool allowing the use of up to 12 SUSS probe heads at one time. In addition, via the use of the manipulator probe, nanowires may be picked and placed onto a device or substrate.
Features
Keithley 2400 source-measurement unit (SMU):
- Source voltage range: 200 mV to 200 V
- Source current range: 1 μA to 1 A
- Measurement resolution (current/voltage): 1 pA / 100 nV
- Resistance measurement range: 0.2 Ω to 200 MΩ
- Banana jacks
- Two-, four-, and six-wire remote voltage-source and measure sensing
NF ZM2372 LCR meter:
- Measurement frequency 1 mHz to 100 kHz
- Signal Level: 10 mV to 5 V
- Constant voltage/constant current drive
- Measurement speed Max. 2 ms
- Equipped with 4-terminal contact check function and a handler interface
- Measurements parameters: Lp, Ls, Cp, Cs, Rp, Rs, |Z|, |Y|, G, Q, D, X, B, Rdc
- Internal DC bias: 0 V to +2.50 V
SUSS probe station
Keithley 2400 SMU
NF ZM2372 LCR meter
