Vendor: J.A. Woollam Co.
Model: Woollam M-2000 Model DI
Purpose: Non-destructive optical characterization of thin films
The Woollam M-2000DI unit is a versatile and powerful variable-angle spectroscopic ellipsometer (VASE) designed for the ex-situ optical characterization of patterned and unpatterned thin films. The VASE technique collects polarization-dependent reflected intensities at variable angles over a wide wavelength range (193 nm to 1690 nm) to extract common ellipsometric parameters (e.g. Ѱ, ∆). This data can be modeled in the CompleteEase software package to obtain thin film thickness, refractive index and absorption properties with high accuracy and sub-nanometer precision.
- Automated goniometer (45°-90° range)
- Automated alignment
- Motorized 150 mm X-Y translation stage enables mapping of large samples
- Focusing optics and camera attachment are available for the measurement of patterned regions on a sample
- Transmission mount can be optionally attached for measurement of thin films on transparent substrates