Ellipsometer [WOOLLAM-ellip] | Quantum-Nano Fabrication and Characterization Facility

Model: Woollam M-2000 Model DI

Purpose: Non-destructive optical characterization of thin films

Equipment description:

The Woollam M-2000DI unit is a versatile and powerful variable-angle spectroscopic ellipsometer (VASE) designed for the ex-situ optical characterization of patterned and unpatterned thin films. The VASE technique collects polarization-dependent reflected intensities at variable angles over a wide wavelength range (193 nm to 1690 nm) to extract common ellipsometric parameters (e.g. Ѱ, ∆). This data can be modeled in the CompleteEase software package to obtain thin film thickness, refractive index and absorption properties with high accuracy and sub-nanometer precision.

System features:

Automated goniometer (45°-90° range)
Automated alignment
Motorized 150 mm X-Y translation stage enables mapping of large samples
Focusing optics and camera attachment are available for the measurement of patterned regions on a sample
Transmission mount can be optionally attached for measurement of thin films on transparent substrates

Ellipsometer [WOOLLAM-ellip]