Vendor: JEOL
Model: IT-510LV
Purpose: Scanning electron microscopy and electron beam lithography
Equipment description:
The IT-510LV is a Tungsten filament scanning electron microscope (SEM) with low vacuum (LV) operation mode. Our IT-510LV is equipped with a suite of accessories (including Nabity Pattern Generation System) to enable electron lithography. This SEM is attached to a Nitrogen glovebox to enable the patterning of samples without leaving the inert environment.
System features:
- Resolution of 3.0 nm at 30 kV and 15.0 nm at 1 kV
- Low vacuum operation mode
- Backscatter Electron Detector
- Electron beam lithography capability
- Nabity Pattern Generation System
- Deben beam blanker
- Keithley 6485 picoammeter
- Glovebox interface enabling patterning of air sensitive samples
