Vendor: Veeco Instruments Inc. (now supported by Bruker Inc.)
Model: DiInnova
Purpose: Scanning probe microscopy of semiconductor samples
Equipment description:
The Vecco diInnova is an atomic force microscope (AFM) which is capable of producing high resolution topographical scans of sample surfaces, as well as generating area maps in various additional analytical modes. In the DiInnova system samples are scanned beneath a stationary probe on a stage connected to a piezo tube. The piezo tube scanner performs finely controlled sample movement in the X, Y and Z directions.
System Features:
- Tapping/contact mode
- Conductive and magnetic mapping modes
- Large area scanner (default configuration) (< 90 µm X 90 µm) with maximum Z-range (<7.5 µm)
- Optional small area scanner offers improved noise performance at the cost of reduced scan area (<5 µm X 5 µm) and Z-range (<1.5 µm).
- Acrylic dust cover and optical solation table to reduce vibration and noise
VEECO DiInnova atomic force microscope
