OMICRON-Org-chamber (Loadlock & Wafer storage)

Vendor:   Scienta Omicron
Model:    Custom Multi-Module UHV Growth & Analysis System: Load-Lock Chamber for MBE System
Purpose: Introducing wafers into multi-module MBE growth system and in-situ wafer storage

Equipment Wiki Link

Characteristics:

  • Lamp heated outgassing of chamber (up to 200C)
  • 2" diameter substrate handling (and smaller)
  • Located at one end of linear transfer line & enables multi-waferloading and storage (up to 6)