Vendor: Scienta Omicron
Model: Custom Multi-Module UHV Growth & Analysis System: Load-Lock Chamber for MBE System
Purpose: Introducing wafers into multi-module MBE growth system and in-situ wafer storage
Characteristics:
- Lamp heated outgassing of chamber (up to 200C)
- 2" diameter substrate handling (and smaller)
- Located at one end of linear transfer line & enables multi-waferloading and storage (up to 6)
