Sohi, N. ., Nieva, P. ., & Khajepour, A. . (2013). A smaller footprint MEMS sensor for on-chip temperature measurement. Reliability, Packaging, Testing, and Characterization of MOEMS MEMS and Nanodevices XII, 8614, 86140B. International Society for Optics and Photonics.
Reference author: P Nieva
First name
P
Last name
Nieva
Shavezipur, M. ., Nieva, P. ., Hashemi, S. ., & Khajepour, A. . (2012). Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness. Journal of Micromechanics and Microengineering, 22, 025022.
Sohi, N. ., Nieva, P. ., & Khajepour, A. . (2012). A new bimaterial microcantilever with tunable thermomechanical response. Microelectronic Engineering, 96, 18-23.
Norris, R. ., Hamel, J. ., & Nieva, P. . (2011). Silicon-integrated phononic bandgap crystal platform for sensors and signal processing elements: Theory and experiment. 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, 636-639. IEEE.
Shavezipur, M. ., Hashemi, S. ., Nieva, P. ., & Khajepour, A. . (2010). Development of a triangular-plate MEMS tunable capacitor with linear capacitance-voltage response. Microelectronic Engineering, 87, 1721-1727.
Bassiachvili, E. ., , Nieva, P. ., & Khajepour, A. . (2010). On-Chip Structures for the Determination of the Dopant-Dependent Young s Modulus of Heavily Phosphorus Doped Polysilicon With Stress Compensation. ASME International Mechanical Engineering Congress and Exposition, 44472, 45-50.
Effa, D. ., Nieva, P. ., Andrew, Z. ., & Lancaster, S. . (2009). Design and modeling of a MEMS accelerometer for a novel Virtual Button user interface. 2009 IEEE Toronto International Conference Science and Technology for Humanity (TIC-STH), 597-602. IEEE.
Shavezipur, M. ., Nieva, P. ., Khajepour, A. ., & Hashemi, S. . (2009). Development of parallel-plate-based MEMS tunable capacitors with linearized capacitance-voltage response and extended tuning range. Journal of Micromechanics and Microengineering, 20, 025009.
Shavezipur, M. ., Nieva, P. ., Khajepour, A. ., & Hashemi, S. . (2009). Effect of Nonlinear Structural Stiffness on the Response of Capacitive MEMS Devices. Proc. Of the Nanotech Conference and Expo, 3-7.
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