Temperature-dependent coefficient of thermal expansion of silicon nitride films used in microelectromechanical systems
| Title | Temperature-dependent coefficient of thermal expansion of silicon nitride films used in microelectromechanical systems |
|---|---|
| Author | |
| Year of Publication |
1999
|
| Journal |
MRS Online Proceedings Library
|
| Volume |
605
|
| Number of Pages |
235-240
|
| Download citation |