Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures
| Title | Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures |
|---|---|
| Author | |
| Year of Publication |
2000
|
| Journal |
Journal of applied physics
|
| Volume |
87
|
| Number of Pages |
4189-4193
|
| Download citation |