Reference author: Patricia Nieva

First name

Patricia

Last name

Nieva

Tada, H., Kumpel, A. E., Lathrop, R. E., Slanina, J. B., Nieva, P., Zavracky, P., … Wong, P. Y. (2000). Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures Journal of Applied Physics, 87, 4189-4193.

Bargmann, M., Kumpel, A., Tada, H., Nieva, P., Zavracky, P., Miaoulis, I. N., & Wong, P. Y. (1999). Temperature-dependent coefficient of thermal expansion of silicon nitride films used in microelectromechanical systems MRS Online Proceedings Library, 605, 235-240.

Tada, H., Abramson, A. R., Miaoulis, I. N., Wong, P. Y., Nieva, P., & Zavracky, P. (1998). Effects of surface patterning in thin film structures on the thermal radiative properties during rapid thermal processing ASME HEAT TRANSFER DIV PUBL HTD, 361, 93-98.

Nieva, P., Tada, H., Zavracky, P., Adams, G., Miaoulis, I., & Wong, P. (1998). Mechanical and thermophysical properties of silicon nitride thin films at high temperatures using in-situ MEMS temperature sensors MRS Online Proceedings Library (OPL), 546.

Shavezipur, M., Nieva, P., Hashemi, S. M., & Khajepour, A. (2009). A Parallel-plate-based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response Sensors & Transducers, 7, 15.

Sohi, A. N., Shavezipur, M., Nieva, P., & Khajepour, A. (2009). A structurally multifunctional pressure-temperature sensor 2009 2nd Microsystems and Nanoelectronics Research Conference, 65-68. IEEE.

Norris, R., Nieva, P., & Hamel, J. (2008). Analytical analysis of a discrete MEMS diatomic mass-spring Phononic Band Gap crystal for vibration stabilization applications SENSORS, 2008 IEEE, 506-509. IEEE.

Shavezipur, M., Hashemi, S. M., Khajepour, A., & Nieva, P. (2008). Development of a linearly tunable modified butterfly-shape MEMS capacitor ASME International Mechanical Engineering Congress and Exposition, 48746, 495-500.

Syed, A., Mu, L., Shavezipur, M., & Nieva, P. (2008). Eliminating the galvanic effect for microdevices fabricated with PolyMUMPs® 2008 1st Microsystems and Nanoelectronics Research Conference, 197-200. IEEE.

Nieva, P. (2008). Laser Interferometry for Harsh Environment MEMS Sensors APS March Meeting Abstracts, 5-002.