Centre for Integrated RF Engineering (CIRFE) Lab Fees
Description Unit of Measurement (UOM) Academic Industrial Natural Sciences and Engineering Research Council of Canada (NSERC)

Labour

per hour

$50.00

$150.00

$37.50

Consultation & lab manager labour

per hour

$75.00

$225.00

$56.25

Training

per hour + equipment charge

$50.00

$150.00

$37.50

Spin coating, exposing, user supplied Mtl's, assisted

per hour

$75.00

$225.00

$56.25

Spin coating, exposing, user supplied Mtl's, unassisted

per hour

$25.00

$75.00

$18.75

Spin coating, exposing, assisted

per hour + cost of materials

$75.00

$225.00

$56.25

Spin coating, exposing, unassisted

per hour + cost of materials

$25.00

$75.00

$18.75

E-Beam evaporation, non-precious metals, unassisted

per hour

$65.00

$195.00

$48.75

E-Beam evaporation, gold, unassisted

per hour + cost of gold

$65.00

$195.00

$48.75

DC sputtering, non-precious metals, unassisted

per hour

$65.00

$195.00

$48.75

DC sputtering, gold, unassisted

per hour + cost of gold

$65.00

$195.00

$48.75

Reactive ion etching (RIE), unassisted

per hour

$40.00

$120.00

$30.00

Plasma enhanced chemical vapour deposition (PECVD), unassisted

per hour

$40.00

$120.00

$30.00

Wire bonding, gold, assisted

per hour

$70.00

$210.00

$52.50

Wire bonding, gold, unassisted

per hour

$20.00

$60.00

$15.00

Flip chip bonding, assisted

per hour

$70.00

$210.00

$52.50

Flip chip bonding, unassisted

per hour

$20.00

$60.00

$15.00

Micro-spot welder, unassisted

per hour

$20.00

$60.00

$15.00

Micro-spot welder, assisted

per hour

$70.00

$210.00

$52.50

Cascade prober with vector network analyzer (VNA), assisted

per hour

$75.00

$225.00

$56.25

Cascade prober with VNA, unassisted

per hour

$25.00

$75.00

$18.75

Spectrum utilization study software (SUSS) vacuum cryo-prober, room temperature

per hour

$125.00

$375.00

$93.75

SUSS vacuum cryo-prober, to 77 Kelvin

per hour + cost of cryo-fluids

$150.00

$450.00

$112.50

SUSS vacuum cryo-prober, below 77 Kelvin

per hour + cost of

$200.00

$600.00

$150.00

Laser micromachining, assisted

per hour

$100.00

$300.00

$75.00

Laser micromachining, unassisted

per hour

$50.00

$150.00

$37.50

Assembly, custom

per hour + cost of consumables (if any)

$75.00

$225.00

$56.25

Dicing, substrate

per hour

$60.00

$180.00

$45.00

Carbon dioxide (CO2) drying, unassisted

per run

$10.00

$30.00

$7.50

CO2 drying, assisted

per run

$60.00

$180.00

$45.00

Dektak, assisted

per hour

$70.00

$210.00

$52.50

Dektak, unassisted

per hour

$20.00

$60.00

$15.00

Electroplating, set-Up

each (if required)

$100.00

$300.00

$75.00

Electroplating, process development

per hour

$50.00

$150.00

$37.50

Electroplating, gold, assisted

per hour + cost of gold (if significant)

$60.00

$180.00

$45.00

Electroplating, gold, unassisted

per hour + cost of gold (if significant)

$30.00

$90.00

$22.50

Electroplating, silver, assisted

per hour

$60.00

$180.00

$45.00

Electroplating, silver, unassisted

per hour

$30.00

$90.00

$22.50

Furnace, high temperature

per hour

$5.00

$15.00

$3.75

Thermal Chamber

per hour $6.75 $20.00 $5.00

Auxiliary VNA, unassisted

per hour

$15.00

$45.00

$11.25

Auxiliary VNA, assisted

per hour

$75.00

$225.00

$56.25

Lakeshore cryo-prober

per hour + cost of cryo-fluids

$125.00

$375.00

$93.75

Gold Cost
Description UOM Price

E-beam

micron

0.5 Troy oz/micron

Sputtering (target weighed before and after)

gram

Current Engelhard gold price

Electroplating (calculated by volume)

gram

Current Engelhard gold price