Clean room facilities

Clean Room

Oxford PlasmaPro 100 Inductively Coupled Plasma (ICP) Deep Reactive Ion Etching (DRIE) Etch System for Si and Oxides

Angstrom Engineering DC/RF Sputtering System

Intlvac Nanoquest Pico Ion-Milling System

SUSS MicroTec MJB4 Mask Aligner

Intlvac Nanochrome Deposition System

Trion Orion Plasma-Enhanced Chemical Vapour Deposition (PECVD) System

Trion Phantom Reactive Ion Etcher (RIE)

Tousimis Automegasamdri-915B, Critical Point Carbon Dioxide (CO₂) Dryer

Logitech Chemical Delayering & Planarization (CDP) System

Oriel Mask Aligner

Lindberg/Blue High Temperature Furnace

Bungard Dry Film Laminator

Yellow Room (for photolithography)

Technic 5-Tank Electroplating System

Maintenance Corridor

Nordson EFD Liquid Dispensing System