- Class 10000 clean room with provisions to make it class 1000
- Laminar flow bench
- Wet bench with dry nitrogen guns and deionized (DI) water dispenser
- Chemical storage cabinets
- Reactive-ion etching (RIE), plasma enhanced chemical vapour deposition (PECVD), combination e-beam and DC magnetron sputtering system, and critical point carbon dioxide (CO2) dryer