SUSS MJB4 Mask Aligner

SUSS MJB4

  • High resolution printing down to 0.5µm
  • Fast and accurate alignment with SUSS Splitfield Microscope
  • High Resolution Optics optmized for thick resists
  • Manual operation
  • Vacuum, Hard, or Soft Contact, and Gap Exposure
  • Up to 100 mm wafers