Intlvac Nanochrome Deposition System

Intelvac Nanochrome

  • Combination e-beam evaporator and DC magnetron sputtering system
  • Possible to sputter and/or evaporate multiple runs without breaking vacuum
  • 1 x four pocket e-beam gun
  • 1 x 6” DC sputtering gun (Argon used as sputtering gas)
  • Automatic pump down cycle
  • Automatic e-beam deposition process with rate controller
  • Semi-automatic sputtering process; operator enters deposition time based on specific sputtering process
  • Materials available for evaporation:
    • aluminum, gold, chromium, nickel, titanium
  • Materials available for sputtering:
    • gold, copper, aluminum, silver, titanium-tungsten

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