- 2 x GSG (ground-signal-ground) 150 µm pitch RF probes
- Probe configuration: 180 degrees
- 2 x DC probes
- Frequency range: 50 MHz – 40 GHz
- Utilizes Agilent PNAs or VNAs (vector network analyzer)
- Temperature range: 294 Kelvin to <3 Kelvin (21°C to -270°C)
- Vacuum pressure: atmosphere to greater than 1 x 10-6 torr
- 2.5” square chuck surface
- RF calibration can be performed in-situ
- Colour charge-coupled device (CCD) camera for viewing/displaying devices under test (DUTs)
- Real time in-situ measurements can be made at low temperature and pressure