- 4 x GSG (ground-signal-ground) 150 µm pitch RF probes
- Probe configuration: 90 degrees
- 2 x DC probes
- Frequency range: 50 MHz – 40 GHz
- Utilizes Agilent 8722ES vector network analyzer (VNA)
- Temperature range: 294 Kelvin to 10 Kelvin (21 °C to -263 °C)
- Vacuum pressure: atmosphere to greater than 1 x 10-6 torr
- 6” diameter chuck surface
- RF calibration can be performed in-situ
- Colour charge-coupled device (CCD) camera for viewing/displaying devices under test (DUTs)
- Real time in-situ measurements can be made at low temperature and pressure
- Colour CCD camera can be replaced with QuikLaze-50 for real time laser trimming capability