- Two GSG-150 (ground-signal-ground, 150µm pitch) RF probes
- Probe orientation: 180 degrees opposite
- Multiple DC probes available with 12µm or 25µm tips
- Frequency Range: 50 MHz to 40 GHz
- Utilizes Agilent 8722ES vector network analyzer (VNA)
- Can handle up to a 6” diameter wafer
- Olympus SZ60 stereo microscope with 20x eyepieces
- Colour charge-coupled device (CCD) camera attached to microscope
- Fiber optic ring illuminator