Integrated multiport RF MEMS switches and switch matrices
The objective of this project is to develop C-type, R-type and multiport (SP3T, SP4T, etc.) MEMS switches. These miniature switches are the basic building blocks in the realization of switch matrices for satellite payloads.
High power RF MEMS switches
The objective of this project is to develop MEMS-based waveguide switch matrices for high power applications as well as millimetre wave applications.
MEMS variable capacitors
The objective of this project is to develop MEMS variable capacitors with improved tuning range and high self-resonance frequency. Both parallel plate and interdigital MEMS capacitors are considered.
MEMS 3D filters
The objective of this project is to develop miniature micromachined filters with built-in tuning elements. The filters are realized using special filter functions that are ideal for such type of filters.
Integrated MEMS phase shifters
The objective of this project is to develop novel configurations for MEMS-based phase shifters for phase array antenna applications.
Design and modeling of MEMS thermal actuators for RF applications
The objective of this project is to develop modelling tools for thermal MEMS actuators as well as to develop thermal actuators with a latching mechanism.
Novel MEMS actuators for RF and optical devices
The objective of this project is to develop novel MEMS actuators for realizing MEMS tuning elements. The list of actuators considered are: thermal actuators, electrostatic actuators, scratch drive actuators, and bimorph actuators.
High-Q micromachined inductors
The objective of this project is to develop novel configurations for high-Q inductors with a high self-resonance frequency. New fabrication processes are investigated to achieve this goal.
MEMS variable inductors
The objective of this project is to develop MEMS variable inductors. MEMS tunable inductors are realized by using MEMS variable capacitors or by applying deformation to micromachined inductors.
Integrated CMOS (complementary metal–oxide–semiconductor) — MEMS voltage controlled oscillators (VCOs)
The objective of this project is to develop a MEMS-based VCO using CMOS 0.18 technology. Both hybrid and monolithic approaches are investigated for integrating MEMS variable capacitors with CMOS chips.
Amplifier tuning using MEMS
The objective of this project is to use MEMS actuators and MEMS variable capacitors and inductors in tuning amplifiers. The MEMS elements are integrated with the amplifiers using flip-chip technology.
MEMS mechanical resonators and filters
The objective of this project is to develop RF MEMS filters based on mechanical resonators. Novel mechanical resonators configurations are investigated under this project.
Optical MEMS
The objective of this project to develop MEMS actuators for scanning applications and for optical alignments. Intelligent approaches are used for alignment.
MEMS packaging
The objective of this project is to develop surface mircromachining processes for wafer level packaging of RF and optical devices.