UW-MEMS Design Handbook

University of Waterloo — Micro-electro-mechanical systems (MEMS) Process Design Handbook Version 5.0 (PDF)

UW-MEMS Design Handbook © Copyright 2010

Version 5.0

Chapter 1: Gold-Based Surface Micromachining Process

Chapter 2: UW-MEMS Layout Design Guidelines

Chapter 3: UW-MEMS Layout Example

Chapter 4: Design Submission

References