User fees

Lab technician using the facilitiesGo to:

User fees in the Centre are based on the self-recovery of operating costs. The fee structure includes two classes of users: "academic" and "non-academic". There are also two types of charges: per hour and per term/annual. In case of minor facility usage, the lab users are charged on an hourly basis. The time is estimated by manager based on the process description provided by the user and by the time booked by the user through the online booking system. In case of major lab usage (e.g., full-time graduate student involved in device fabrication research), a flat annual fee is charged every term in equal installments. The fee structure including the rates is to be reviewed each term based on the number of lab users and existing financial support. The foundation for the facility operation is a not-for-profit principle. The goal is to maximize the creative use and the scientific and technological output of the facility while operating it cost-efficiently for the users in the no-revenue fashion.

The users are responsible for purchasing supplies or special materials for project-specific needs (masks, special metals or chemicals, equipment modifications such as wafer carriers, etc.)

Equipment operation training and process operator services are subject to charge. Training fees are charged as an hourly rate; the number of hours charged to any user is fixed. There is also no charge for the introductory safety training. However, projects that require major technical assistance outside the lab might be subject to charges. All lab equipment and access fees are subject to change.

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Re-charge categories

Industry project charges

  • Research project by a company which has 1 or more people (up to 4 maximum) embedded in Giga-to-Nanoelectronics (G2N) on a full-time basis
  • Research results may be proprietary
  • Have access to entire suite of equipment in G2N
  • Annual access fees are $75K
  • Additional user fees apply for each researcher, in the amount of $3800/user/term
  • Training and staff fees for G2N equipment are $75-$100 per hour

Industry access charges

  • One researcher (up to 4 maximum) working in G2N on a part-time basis (less than 25 hours/week)
  • Research results may be proprietary
  • Access fee of $7500/year contributes to lab overhead, staffing and support. Each additional researcher pays $5000/year
  • User fees apply for each researcher in the amount of $3800/person/term
  • Equipment usage fee is applied, and the cost will vary depending on the equipment used
  • Training and staff fees for G2N equipment are $75-$100 per hour

Industry partner charges

  • Partner is participating in an active G2N research project funded through a University of Waterloo faculty member. Research funds come in part from industrial partner, and in part form research grants, through which a contribution is made to the university
  • G2N researchers are post-doctoral fellows or graduate or undergraduate
  • Research results may be publicly disclosed in journal articles or reports
  • Employees of the industry partner are allowed to use G2N facilities up to two employees maximum
  • Access fees presently set at $3800/person/term
  • Training and staff fees are waived

Academic user charges

  • Academic users include full-time students or post-doctoral fellows of University of Waterloo funded at least in part through research grants
  • Academic users include graduate students (or undergraduate co-op students working under supervision)  at the University of Waterloo toward a degree
  • Research results may be published or shared in journal articles or reports
  • Access fees presently set at $1900/person/term apply
  • Access to the suite of equipment available in G2N
  • Training and staff fees are waived

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Individual equipment fees 

General lab fees          (fees are under review)

(bracketed rates are charges for the involvement of G2N personnel, including training charges)

Equipment/Service Rate external Rate academic Period
Analytical instrumentation $100.00 $25.00  hour
G2N lab access $3,800.00 $1,900.00 term
Incidental materials $30.00    
Probe station (G2N operation) $250.00  ($350.00) $75.00 hour
Project cost $75,000.00 $75,000.00 project
Training costs $200.00 $100.00 hour

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Deposition equipment fees

Equipment/Service Rate external Rate academic Period
     
Edwards sputtering system (G2N operation) $200.00 ($300.00) $50.00 ($100.00) hour
Intlvac thermal/E-beam evaporator (G2N operation) $250.00 ($350.00)

$75.00 ($150.00)

hour
Plasmatherm plasma-enhanced chemical vapor deposition (PECVD) (G2N operation) $250.00 ($350.00) $75.00 ($150.00) hour
WLOS cluster sputtering tool (G2N operation) $250.00 ($350.00) $75.00 ($150.00) hour
WLO1 or WLO2 cluster tool (G2N operation) $250.00 ($350.00) $75.00 ($150.00) hour

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Characterization equipment fees

Equipment/Service Rate external Rate academic Period
Dektak 8 (G2N operation)

$100.00 ($150.00)

$50.00 ($100.00) hour
Dimension 3100 AFM (G2N operation) $200.00 ($250.00) $50.00  ($100.00) hour
Hitachi scanning electron microscope (SEM) (G2N operation) $60.00 ($125.00) $25.00 ($75.00) hour
Reichert polylite 88 microscope $100.00 $25.00 hour
Raman spectrometer (G2N operation) $100.00 ($150.00) $50.00 ($100.00) hour

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Packaging and bonding equipment fees

Equipment/Service Rate external Rate academic Period
Dicing saw (G2N operation) ($200.00) $50.00 ($100.00) hour
Kulicke and soffa wire bonder (G2N operation) (limited availability) $150.00 ($250.00) $100.00 hour

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Etching equipment

Equipment/Service Rate external Rate academic Period
Wet processing station $100.00 ($150.00) $25.00 ($50.00) hour
Phantom II RIE (G2N operation) $100.00  ($200.00) $25.00 ($75.00) hour

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Lithography equipment

Equipment/Service Rate external Rate academic Period
Laurell spinners $125.00 ($150.00) $50.00 ($75.00) hour
Lithography wetbench $100.00 $50.00 hour
MA6 mask aligner (G2N operation) $200.00  ($300.00) $50.00 ($100.00) hour
MJB3 mask aligner (G2N operation) $200.00  ($300.00) $50.00 ($100.00) hour
   

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