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Giga-to-Nanoelectronics Centre
  • Giga-to-Nanoelectronics Centre home
  • About Giga-to-Nanoelectronics Centre
  • Lab equipment
    • Characterization equipment
    • Deposition equipment
    • Etching equipment
    • Lithography equipment
    • Packaging and bonding equipment
    • Equipment booking
  • Access
  • Research
  • Publications
  • Policy
  • Safety
  • News
  • G2N Lab User Training Requirements - Covid-19 Safety
  1. Giga-to-Nanoelectronics Centre
  2. Lab equipment

Etching equipment

The Giga-to-Nanoelectronics (G2N) Centre has both wet etching and dry etching (F-based, O-based, and Cl-based dry etching (RF,ICP)) capabilities.

  • Wet processing station
  • Phantom II RIE

Return to lab equipment

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Giga-to-nanoelectronics centre

Giga-to-Nanoelectronic Centre 
Department of Electrical and Computer Engineering
University of Waterloo 
200 University Avenue West 
Waterloo, Ontario, Canada N2L 3G1

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The University of Waterloo acknowledges that much of our work takes place on the traditional territory of the Neutral, Anishinaabeg and Haudenosaunee peoples. Our main campus is situated on the Haldimand Tract, the land granted to the Six Nations that includes six miles on each side of the Grand River. Our active work toward reconciliation takes place across our campuses through research, learning, teaching, and community building, and is centralized within our Office of Indigenous Relations.

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