The Giga-to-Nanoelectronics (G2N) Centre has the deposition capabilities for a variety of semiconductor, dielectric and conductive thing films: amorphous, nanocrystalline and poly-Si, SiOx, SiNx, SiOxNy, SiC, SiCN, ITO, ZnO, Al, Cr, Mo, W, Ta, organic materials (both small molecule and polymers). The maximum substrate size varies from 3 inches to 12 inches depending on the system.