Angstrom Engineering* EvoVac vacuum deposition system

The EvoVac is a glove box-enclosed single chamber vacuum deposition system equipped with 10 resistive thermal evaporation sources (4 source co-deposition capability), an electron beam source with a 7cc boat and a Gridless Ion Beam Source for oxygen or argon ion beam assist (100-300 kev).

The system is used for fabrication of organic electronic devices.

*Angstrom Engineering is a sponsor of the Giga-to-Nanoelectronics Centre