The Giga-to-Nanoelectronics (G2N) Centre has a wide variety of thin film device
and circuit characterization tools.
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List of Characterization Equipment
Deposition equipment
The G2N Centre has the deposition capabilities for a variety of semiconductor, dielectric and conductive thin films: amorphous, nanocrystalline and poly-Si, SiOx, SiNx, SiOxNy, SiC, SiCN, ITO, ZnO, Al, Cr, Mo, W, Ta, organic materials (both small molecule and polymers). The maximum substrate size varies form 3 to 12 inches depending on the system.
List of Deposition Equipment
Etching
The G2N Centre has both wet etching and dry etching (F-based, O-based, and Cl-based dry etching (RF,ICP)) capabilities.
List of etching equipment
Lithography equipment
The G2N Centre has the ultraviolet (UV) contact lithography capabilities with resolution about 1 micrometer.
List of lithography equipment
Packaging and bonding equipment
The G2N Centre has wafer dicing and wire bonding capabilities.
List of packaging and bonding equipment