AJA sputtering tool

AJA Sputtering ToolATC ORION series sputtering tool is a multi-target sputtering system designed for combinatorial experimental research.

Up to 5 two-inch sputter targets can be installed and run using dc-magnetron or rf sputtering of metals, semiconductors and dialectrics. The sputter system is capable of substrate heating up to 1000oC and has a base pressure of 5x10-7 Torr.

The system is specifically designed for deposition of transition metal oxides for transparent flexible electronics applications.

Users can use a variety of baseline sputter targets and may supply their own special target material after consultation with the G2N technical lab manager.