COVID-19 updates:

University of Waterloo Coronavirus Information website

See list of Faculty of Engineering Modified Services

The Giga-to-Nanoelectronics Centre has reopened for research activities, as of August 17 2020.  Researchers wishing to use the facilities are required to review the new and additional safety material listed in the link at the left side of this page.

Karl suss MA6 mask aligner

Karl Suss MA6 Mask AlignerThe SUSS MA6 mask aligner is regarded as the benchmark from semiconductor submicron research to 3D micro-system production.

The system is available with bottom-side-alignment microscopes for accurate backside processes, which is an important feature, especially in microsystem technology. For all classic lithography and topside alignment a dual video microscope is available. The maximum wafer size exposed is 6" square.

Find out what we charge to use the Karl suss MA6 mask aligner.

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