Parylene films are widely used for coating electronic devices and components. Parylene is deposited on surfaces at room temperature, forming conformal transparent films with good adhesion, thermal, dielectric and optical properties and with excellent chemical and biological stability.
SCS PDS 2010 Labcoter consists of a bell jar enclosed vacuum chamber designed to polymerize vaporized parylene C dimer, in order to deposit conformal parylene coatings. The typical coating thickness is in range of 1 to 50 microns. The system has 3 shelves that can be used for coatings on substrates up-to 15 cm diameter with coating rate of 5 microns/hour.