Matthieu Nannini: Nanolithography using Thermal Probe AFM: principle and applications

Matthieu Nannini, McGill University

While IBM Zurich's millipede project of data storage did not
have the success anticipated it would, a new technology for nano
lithography was born. Since 2009, IBM Zurich has been refining their
thermal probe AFM (Atomic Force Microscopy) lithography technique up until 2012 when an IBM spin-off sold their first tool to the McGill Nanotools Microfab. In this seminar, we will first go through the principles of operation of such a tool and then will focus on 2 applications of interests at McGill: bi-level coupling gratings for silicon photonics and contacting
nano-objects while avoiding any beam irradiation.