Title | Modeling of Contact and Stiction in Electrostatic Micro-Cantilever Actuators |
Publication Type | Journal Article |
Year of Publication | 2012 |
Authors | Vyasarayani, C., A. Abdel-Rahman, and J. McPhee |
Journal | ASME J. Nano. Eng. Med |
Volume | 3 |
Pagination | 1-8 |
Type of Article | Published |