Dynamic Analysis of Micromirrors with Staggered Vertical Combdrives Actuation

TitleDynamic Analysis of Micromirrors with Staggered Vertical Combdrives Actuation
Publication TypeConference Proceedings
Year of Conference2007
AuthorsRasheed, S., J. Yeow, and J. McPhee
Conference NameProc. CANCAM
Conference LocationToronto