The Nano and Micro Systems Lab (NMSL) at the University of Waterloo (Waterloo) conducts research in state-of-the-art micro and nano-sensing and actuation technologies. This research contributes to the fundamental sciences and addresses issues in global healthcare, energy and the environment. A recent focus of NMSL aims to develop a novel cantilever beam Micro-electromechanical Systems (MEMS) gyroscope with frequency modulated (FM) readout. The gyroscopes undergo coupled flexural vibrations in two orthogonal directions (y and z axis) when they are subjected to base rotation around the beam’s longitudinal x-axis. The gyroscope detects angular rotations as the difference between the natural frequencies of two closely spaced drive and sense modes rather than the magnitude of displacement in the sense direction. In order to demonstrate the concept, a prototype MEMS gyroscope was designed and fabricated using the process for Teledyne Dalsa MEMS Integrated Design for Inertial Sensors (MIDIS™).
David Effa, a PhD candidate, performed a modal analysis for a cantilever beam MEMS gyroscope in order to adhere to the operational requirements and the constraints set by the MIDIS™ fabrication process.
A cantilever beam MEMS Gyroscope
The primary teaching objective of this case study is to illustrate dynamic forces in mechanical system modeling and analysis. This case is also intended to demonstrate time and frequency domain solutions as well as the application of eigenvalue and eigenvector calculations.