Minor repairs to air handling in UV Litho bay

Thursday, February 18, 2021

Dear All,

Minor repairs are required on the air handling unit which serves the UV Lithography bay in the QNC Cleanroom, module # 1701P.

The work is scheduled for this Friday, February 19 from 7:30AM to approximately 8:15AM.

The ventilation alarm in this module may sound during these activities. The alarm horn and strobe is located above the door at the rear of the module which leads to the chemical storage cabinets in the service chase area. If this particular alarm sounds during the planned interval, there will be no health risk to cleanroom occupants.

While it is OK to use the rest of the QNC cleanroom, it will be best to stay away from this particular module during the planned activities. Thus, as a precautionary measure, most tools located in module 1701P have been reserved during the planned interval in question.

Please do not hesitate should you have any questions or concerns.

Thank you.

Regards,

Vito

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