Posts for the Topic electron beam lithography

A blog written by quantum researchers for quantum researchers and those interested in their work.

New Electron Beam Lithography equipment at Quantum NanoFab

The Quantum NanoFab is used by many researchers at the Institute for Quantum Computing (IQC) to build new quantum structures for study in their labs. It is a cleanroom laboratory that uses technologies from the microelectronics industry in order to enable the fabrication of a variety of experimental quantum devices. As the Quantum NanoFab’s resident process engineer I would like to talk briefly about electron beam lithography in general and our new JEOL JBX-6300FS electron beam lithography tool in particular.

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