Professor, Electrical and Computer Engineering

Research interests: micro-nanofabrication, lithography, MEMS fabrication, microneedle, AFM probe fabrication, terahertz photoconductive antenna, dry plasma etching


Professor Bo Cui received his BS in Physics from Peking University, China, in 1994. After two years of graduate study in the same department, he moved to the University of Minnesota, then to Princeton University in 1998, where he earned his master’s degree in 2000 and PhD in 2003 from the Nanostructure Laboratory (led by Professpr Stephen Y. Chou), Department of Electrical Engineering. After completing his PhD, Cui joined the National Research Council of Canada, Industrial Materials Institute in Boucherville in 2003. Cui joined the Department of Electrical and Computer Engineering (Nanotechnology Engineering program) in 2008.

Cui leads the Waterloo Nanofabrication Group whose research is focused on nano- and microstructure fabrication using Nano-Imprint Lithography (NIL) and electron beam lithography, thin film deposition and etching, with applications in biomedical, nanoelectric and other areas.


  • PhD, Electrical Engineering, Princeton University, 2003
  • MA, Electrical Engineering, Princeton University, 2000
  • BS, Physics, Peking (Beijing) University, 1994
Bo Cui
    University of Waterloo