Mustafa Yavuz

Professor, Mechanical and Mechatronics Engineering

Research interests: superconductivity; thin films and single crystals; nano sensors; NEMS; MEMS; quantum information storage


Professor Mustafa Yavuz envisions a production tool that can harness new types of magnetic templates and exploit them to make radically new devices and materials. These templates are an enabling tool for self-assembly manufacture/production of magnetic particles into new nano-structured macro-materials, with applications to sensors, nano-electronics, and quantum computers.

Yavuz and his team in the Nano-Micro Systems Laboratory have been developing NEMS device packaging and integrating them into MEMS and conventional CMOS systems.

To date, Yavuz has authored and co-authored over 200 refereed journal and conference publications, seven patents and patent disclosures, 40 invited talks and key note speeches. In addition, he has contributed two book chapters for the Handbook of Nanoceramics and for the Handbook of Microjoining and Nanojoining and one chapter edited for the Institute of Electrical and Electronics Engineers (IEEE) Transactions on Applied Superconductivity. Yavuz received the British Council Partnerships for Excellence Postdoctoral Bursary International Award in 1997 for his work on high temperature superconductors. In the same year, he was appointed as Assistant Professor at the Tohoku University, Sendai, Japan. From 1998 to 1999, Yavuz held the role of Principal Project Engineer at Accelerator Technology Corp., Bryan, Texas and the role of Texas Engineering Experiment Station (TEES), Research Assistant and Associate Professor at the Texas A&M University between 1999 and 2004. He joined the University of Waterloo as a faculty member in 2004.

He is cited as one of the most prominent nano-researchers in Canada by the Ontario Provincial Government, and was invited in 2007 and 2009 by the Canadian Ambassador for Japan as one of the Canadian Delegation to promote Canadian nanotechnology research in Tokyo, Japan.


  • PhD, Applied Physics, University of Wollongong, Australia

  • PhD, Materials Engineering, University of Wollongong, Australia

  • MS, Middle East Technical University, Turkey

  • BS, Middle East Technical University, Turkey

Mustafa Yavuz

Awards and Honours

Year Awards and Honours
2007 Japanese Society for the Promotion of Science (JSPS) Fellowship
2003 US Pi-Tau-Sigma, National Mechanical Engineering Teaching Award, US
1999 Honorary Fellow, ISEM, University of Wollongong, New South Wales - Australia
1997 British Council Partnerships for Excellence Post-doc International Award, UK
1994-1996 Australian Postgraduate Award, Australian Institute of Nuclear Science & Engineering (AINSE), Australia
1994-1996 Wollongong University Postgraduate Award for Research, Australia
1990 NATO Award, Italy
1989 NATO Award, Hungary


Research interests

  • Nano and micro-fabrication (N/MEMS)

  • Micro- and nano-joining, Packaging and Reliability

  • Quantum Electronic Solids: Superconductors, Metamaterials and Graphene

The research performed by Professor Yavuz's group at the Nano and Micro Systems Lab is on micro and nanoscale materials design, fabrication and characterization, in four key applications areas:

  1. Design, fabrication and characterization of high temperature (high-Tc) superconducting composite cables and wires used for superconducting magnets and MR tomography;

  2. Design, fabrication and characterization of high-Tc superconducting thin films for Superconducting Quantum Interference Devices (SQUID) bio-sensors, and Qubits (Quantum Bits) for quantum information storage;

  3. Design, fabrication and characterization of nano-building-blocks (think films, nanowires, nanochannels, nanotubes, nanoparticles) for nano- and micro-electro-mechanical systems (N/MEMS) for photonic and electro-magnetic applications and ultrafast electronics (graphene-based NEMS), and

  4. Packaging (nano- and micro-bonding), testing and reliability of MEMS and Graphene-based NEMS devices and interconnects.

Most Significant Contributions to Research and/or to Practical Applications

  • Developed a production tool that can be used to create templates for nano-electronics. This has been enabling the fabrication of radically new devices and materials such as quantum computers. He has developed the idea that vortices (nanoscale non-superconducting domains in a superconducting matrix) in these templates can be engineered to make for self-assembly manufacture of magnetic particles into new nano-structured materials and nano-scale electronic devices such as bio-SQUIDs and Qubits (US Patent, M. Yavuz et al, “Method and System for Storing Information Using Nano-Pinned Dipole Magnetic Vortices in Superconducting Materials, Jr., # 6,787,798, September 7, 2004).

  • Pioneered developing smart magnetic thin films for the levitation of N/MEMS (flying MEMS). His contribution in this research is in developing design and fabrication of magnetic thin films and MEMS gripper materials using ferromagnetic thin films for the magnetic levitation (US Patent Application, MEMS Magnetic Levitation, Application No: 60/847934, Sept 29, 2006.

  • Developed graphene based NEMS devices interconnection packaging, metrology and integrating them into MEMS and conventional CMOS systems (N. Udayakumar, A. Chakraborty, M. Irannejad, B. Cui, A. Brzezinski, M. Yavuz “the Effects of Using Buffer Layers on Nanowire Bonding and Conductance Properties of Graphene Based Electronic Devices”, 14thInternational Conference on Nanotechnology, IEEE-Nano2014, 18-21 August, 2014, Toronto, Canada; and N. Udayakumar, A. Chakraborty, M. Irannejad, B. Cui, A. Brzezinski, M. Yavuz “Effects of using 2D-materials buffer layer on the wirebonding of grapheme based devices”, Graphene conference, 6-9 May, 2014, Toulouse, France)


Recent publications include:

  • A. S. Abbas, M. Yavuz and B. Cui “Polycarbonate electron beam resist using solvent developer”, Microelectronic Eng, vol. 113, pp. 140–142, 2014
  • M. Irannejad, J. Zhang, M. Yavuz and B. Cui “Numerical study of optical behavior of nano-hole array with non-vertical profile”,Plasmonics, vol. 9, Issue 3, pp. 547-544, 2014
  • M. Yavuz, A. Brzezinski, B. Cui and E. Abdel-Rahman, “Editorial: Trends in Nano and Micro-Electro-Mechanical Systems and Training Recommendations for Highly Qualified Personnel (HQP) in This Field”, Austin Journal of Nanomedicine & Nanotechnology, vol.2, issue 1, 2014, 2014
  • M. Yavuz, M. Irannejad, A. Brzezinski, B. Cui, and E. Abdel-Rahman, “Editorial: An Outlook to Nanotechnology”, Nanoscience & Technology (Symbiosis), 2013, vol. 1, Issue 1, 2014
  • F. Aydinoglu, M. Alhazmi, B. Cui, O. M. Ramahi, M. Irannejad, A. Brzezinski, and M. Yavuz “Higher Performance Metal-Insulator-Metal Diodes using Multiple Insulator Layers, Austin Journal of Nanomedicine & Nanotechnology, vol. 1, Issue 1, 2014 
  • M. Alhazmi, F. Aydinoglu, B. Cui, O. M. Ramahi, M. Irannejad, A. Brzezinski, and M. Yavuz “Comparison of the Effects of Varying of Metal Electrode in Metal-insulator-metal Diodes with Multi-Dielectric Layers”, Austin Journal of Nanomedicine & Nanotechnology, vol. 2, Issue 2, 2014