Director, Collaborative Graduate Nanotechnology Program

Contact InformationMustafa Yavuz

Phone: 519-888-4567 x32093
Location: E5 3011


Biography Summary

Mustafa Yavuz is a professor in the Department of Mechanical and Mechatronics Engineering with cross-appointments to Electrical and Computer Engineering and Systems Design Engineering. Dr. Yavuz is the Director of the Nano- and Micro- Systems Lab at the Waterloo Institute of Nanotechnology (WIN) and Director of Collaborative Graduate Nanotechnology Program.

Dr. Yavuz’s research area is nano- and microscale functional materials and device design, fabrication and characterization, in four key applications areas: i) High temperature-superconductor magnets (HTSC) (beyond 20T) for “driven subcritical fission” thorium-recycle nuclear reactor accelerators; ii) HTSC Josephson junctions based (superconducting quantum interference (SQUID)) sensors for quantum information processing; iii) Opto-nano- and micro-electro-mechanical systems (O-N/MEMS) for ultrafast electronics and sensing; iv) Electro-mechanical-packaging, nanojoining, integration (nano and micro-assembly) and testing of O-N/MEMS devices (sensors, transducers, actuators, and energy harvesters).

Research Interests

  • Nano- and Micro-Electro-Mechanical-Systems (N/MEMS)
  • Nano-joining (-electro-packaging), Nano- and Micro-Assembly and Integration
  • Nanoplasmonic Sensors
  • Photo-electro-chemical Oxygen Demand (PECOD) Sensors
  • Nanomaterials and Thin Films
  • Quantum Electronic Solids: Superconductors, Graphene/Graphene-like Materials, Transition Metal Chalcogenides (TMD)
  • Nanorobotics, Digital Design and Fabrication Technologies (Digital Factories)
  • Autonomous and Embedded Sensors (Fit and Forget) and Sensor Nodes
  • Wearable Technology
  • Energy Harvesting
  • Field-Effect-Transistor (FET)-based Biosensors


  • 1996, Doctorate, Materials Engineering, University of Wollongong
  • 1995, Doctorate, Applied Physics, University of Wollongong
  • 1991, Master's, Materials Engineering, Middle East Technical University
  • 1989, Bachelor's, Materials Engineering, Middle East Technical University (METU)


  • BME 282 - Materials Science for Biomedical Engineers
    • Taught in 2019, 2020
  • ME 235 - Materials Science and Engineering
    • Taught in 2017, 2018, 2019
  • ME 340 - Manufacturing Processes
    • Taught in 2019, 2020, 2021, 2022
  • ME 596 - Special Topics in Mechanical Engineering
    • Taught in 2017, 2018, 2019, 2020, 2021, 2022
  • ME 738 - Special Topics in Materials
    • Taught in 2017, 2018, 2019, 2020
  • ME 739 - Manufacturing Processes Topics
    • Taught in 2019
* Only courses taught in the past 5 years are displayed.

Selected/Recent Publications

  • M. Arabi*, M. Alghamdi, K. Kabel, A. Labena, W.S. Gado, B. Mavani, A.J. Scott, A. Penlidis, M. Yavuz, E. Abdel-Rahman, Detection of Volatile Organic Compounds by Using MEMS Sensors, Sensors (MDPI, IF=3.847), 2022
  • B.B. Azer*, A. Gulsaran*, J. R. Pennings*; R. Saritas*, S. Kocer*, J. L. Bennet†, Y. D. Abhang§, M. A. Pope, E. A.-Rahman, M. Yavuz, A Review: TiO2 Based Photoelectrocatalytic Chemical Oxygen Demand Sensors and Their Usage in Industrial Applications, Journal of Electroanalytical Chemistry (Elsevier, IF= 4.464), 2022
  • A. Kamel*, S. Kocer*, L. Mukhangaliyeva, M. Basha, R. Saritas*, A. Elhady, A. Gulsaran*, P. Hajireza, M. Yavuz, and E. Abdel-Rahman, P. Hajireza, M. Yavuz, and E. Abdel-Rahman “Resonant Adaptive MEMS Mirrors,, Actuators (MDPI), 2022
  • I. Novodchuk*, M. Kayaharman*, I. Prassas, A. Soosaipillai, R. Karimi, I.A. Goldthorpe, E. Abdel-Rahman, J. Sanderson, E.P. Diamandis, M. Bajcsy, and M. Yavuz, Electronic detection of SARS-CoV-2 N-protein before the onset of symptoms”, Biosensors and Bioelectronics, Biosensors and Bioelectronics (Elsevier, IF=10.618), 2022
  • A. Gulsaran*, B.B. Azer*, S. Kocer*, S. Rahmanian, R. Saritas*, E. M. Abdel-Rahman and M. Yavuz, Built-in Packaging for Single Terminal Devices, Sensors (MDPI, IF= 3.847), 2022
  • I. Novodchuk, M. Bajcsy, M. Yavuz “Graphene-Based Field Effect Transistor Biosensors for Breast Cancer Detection: A Review on Biosensing Strategies, Graphene-Based Field Effect Transistor Biosensors for Breast Cancer Detection: A Review on Biosensing Strategies, Carbon (Elsevier, IF=9.594), 2021
  • I. Novodchuk, M. Kayaharman, I.R. Ausri, R. Karimi, X.S. Tang, I.A. Goldthorpe, E. Abdel-Rahman, J. Sanderson, M. Bajcsy, M. Yavuz, An ultrasensitive heart-failure BNP biosensor using B/N co-doped graphene oxide gel FET, Biosensors and Bioelectronics (Elsevier, IF= 10.61), 2021
  • A. H Alshehri*, A. Shahin, K. Mistry, K. H. Ibrahim, M. Yavuz, K. P. Musselman, Metal-Insulator-Insulator-Metal Diodes with Responsivities Greater Than 30 A/W Based on Nitrogen-Doped TiOx and AlOx Insulator Layers, Advanced Electronic Materials (Wiley, IF=7.633), 2021
  • K. Mistry*, V. H. Nguyen, M. Arabi*, K. H. Ibrahim*, H. Asgarimoghaddam, M. Yavuz, D. Muñoz-Rojas, E. M. Abdel-Rahman, K. P. Musselman, A highly sensitive self-actuated zinc oxide resonant microcantilever gas sensor for humidity detection, Nano Letters (ACS, IF=11.19), 2021
  • K. Ibrahim*, A. Shahin, A. Jones, A. Alshehri, K. Mistry, M. Singh, F. Ye, J. Sanderson, M. Yavuz, and Kevin Musselman, Humidity-resistant perovskite solar cells via the incorporation of halogenated graphene particles, Solar Energy (Elsevier, IF=4.67), 22, 2021, 787 - 797
  • A. Alshehri, J. Loke, V. Nguyen, A. Jones, H. Asgarimoghaddam, A. Shahin, K. Ibrahim, K. Mistry, D. Munoz-Rojas, M. Yavuz, K. P. Musselman, Nanoscale film thickness gradients printed in open air by spatially varying chemical vapor deposition, Advanced Functional Materials (Wiley, IF= 19.924), 2021
  • I. Novodchuk, M. Kayaharman, S. Al-Tuairqi, K. Ibrahim; M. Irannejad, E. Abdel-Rahman, J. Sanderson, M. Bajcsy, M. Yavuz, B/N co-doped graphene oxide gel with extremely-high mobility and ION/IOFF for large-area field effect transistors, Carbon (Elsevier, IF=9.6), 2020
  • M. Ghommem, F. Najar, M. Arabi, E. Abdel-Rahman, M. Yavuz, A Universal Model for Electrostatic Sensors in Fluid Media, Nonlinear Dynamics (Springer, IF=5.741), 2020
  • M. Arabi, M. Gopanchuk, E. Abdel-Rahman, M. Yavuz, Measurement of in-plane motions in MEMS, Sensors (MDPI, IF=3.3), 2020
  • A. Jones, K. Mistry, M. Kao, M. Yavuz, K. P. Musselman, In-situ spatial and temporal electrical characterization of ZnO thin films deposited by atmospheric pressure spatial chemical vapor deposition on flexible polymer substrates, Scientific Reports (Nature, IF=4.996), 2020
  • K. Mistry, A. Jones, M. Kao, T. Yeow, M. Yavuz, K Musselman, In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system”, Accepted, Nano Express (IoP, IF=3.6), 2020
  • K. Mistry, K. H. Ibrahim, I. Novodchuk, H. T. Ngo, J. Sanderson, M. Yavuz, G. Yoshikawa, K. P. Musselman, Nanomechanical gas sensing with laser treated two dimensional nanomaterials, Advanced Materials Technologies (Wiley IF=8.856), 2020
  • D. Alsaedi, M. Irannejad, K. H. Ibrahim, A. Almutairi, A. Ramadhan, K. P. Musselman, J. Sanderson, M. Yavuz, O. Ramahi, High Operation Stability and Different Sensing Mechanisms in Graphene Oxide Gel Photodetectors Utilizing Thin Polymeric Layer, Applied Electronic Materials (American Ceramic Society, IF=8), 2020
  • G. Imamura, K. Minami, K. Shiba, K. Mistry, K. P. Musselman, M. Yavuz, G. Yoshikawa, K. Saiki, S. Obata, Graphene oxide as a sensing material for gas detection based on nanomechanical sensors in the static mode, Chemosensors (MDPI, IF=2.7), 2020
  • R. Alharbi, M. Yavuz, Promote Localized Surface Plasmonic Sensor Performance via Spin-Coating Graphene Flakes over Au Nano-Disk Array, Photonics (MDPI, IF=2.14), 2019
  • M. Kayaharman, T. Das, G. Saviora*, R. Saritas, E. Abdel-Rahman and M. Yavuz, Design, Fabrication and Characterization of Ferroelectret Energy Harvester, Materials (MDPI, IF=3.623), 2019
  • K. Ibrahim, I. Novodchuk, K. Mistry, M. Singh, C. Ling, J. Sanderson, M. Bajcsy, M. Yavuz, and K. P. Musselman, Laser-Directed Assembly of Nanorods of 2D Materials, Small (Wiley, IF=15.5), 2019
  • R Alharbi, M. Irannejad, M. Yavuz, A Short Review on the Role of the Metal-Graphene Hybrid Nanostructure in Promoting the Localized Surface Plasmon Resonance Sensor Performance, Sensors (MDPI), 2019
  • M. H. Ghajar, M. M. Mashhadi, M. Irannejad, S. Jebril, M. Yavuz, E. Abdel‐Rahman, Degree of Crystallinity and β Phase fraction of Polyvinylidene Fluoride Nanocomposites Containing Ionic Liquid and Graphene/Carbon nanotube, Polymer Composites (Wiley, IF=3.171), 2018
  • A. H. Alshehri, K. Mistry, V. H. Nguyen, K. H. Ibrahim, D. Muñoz-Rojas, M. Yavuz and K. P. Musselman, Quantum-tunneling metal-insulator-metal diodes made by rapid atmospheric pressure chemical vapor deposition, Advanced Functional Materials (Wiley-VCH, IF= 19.92), 2018
  • K.H. Ibrahim, M. Irannejad, B Wales, J Sanderson, M Yavuz, KP Musselman, Simultaneous Fabrication and Functionalization of Nanoparticles of 2D Materials with Hybrid Optical Properties, Advanced Optical Materials (Wiley, IF=9.926), 2018
  • S. Park, M. Khater, D. Effa, E.M. Abdel-Rahman, M. Yavuz, Detection of Cyclic-Fold Bifurcation in Electrostatic Transducers by Motion-Induced Current, J. Micromechanics and Microengineering (IoP, IF=2.14), 27(8), 2017
  • K. Mistry, M. Yavuz, K. Musselman, Simulated Electron Affinity Tuning in Metal-Insulator-Metal (MIM) Diodes, Journal of Applied Physics (AIP, IF=2.13), 2017
  • D. Alsaedi, M. Irannejad, K. H. Ibrahim, A. Almutairi, K. Musselman, O. Ramahi, M. Yavuz, High-Responsivity Reduced Graphene Oxide Gel Photodetector for Visible-Light Detection with Large Detection Area and End-Contact Interface, Journal of Materials Chemistry C (IF= 8.067), 2017
  • M. Alghamdi, A. Alneamy, S. Park, B. Li, M. Khater, E. Abdel-Rahman, G. Heppler, M. Yavuz, Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator, Sensors (MDPI: Special Issue "MEMS and Nano-Sensors"), 2017
  • K. H. Ibrahim, M. Irannejad, M. Hajialamdari, A. Ramadhan, K. P. Musselman, J. Sanderson, M. Yavuz, A novel femtosecond laser-assisted method for the synthesis of reduced graphene oxide gel and thin films with tunable properties, Advanced Materials Interfaces (IF=4.8), 2016
  • R. Alharbi, M. Irannejad, M. Yavuz, Gold-graphene Core-shell Nanostructure Surface Plasmon Sensors, Plasmonics (Springer, IF=2.3)), 2016
  • Irannejad, Mehrdad and Cui, Bo and Yavuz, Mustafa, The effects of varying dielectric spacer height on the reflection resonance spectrum of gold nanorod-on-mirror grating structure, Plasmonics, 10(4), 2015, 901 - 909
  • Zhang, Jian and Irannejad, Mehrdad and Yavuz, Mustafa and Cui, Bo, Gold Nanohole Array with Sub-1 nm Roughness by Annealing for Sensitivity Enhancement of Extraordinary Optical Transmission Biosensor, Nanoscale research letters, 10(1), 2015
  • J Zhang, M Irannejad, M Yavuz and B Cui, Enhanced Sensitivity of Smooth Gold Nanohole Array by Thermal Annealing, ACS Photonics (American Chemical Society, IF=6.88)), 2015
  • J. Zhang, M. Irannejad, M. Yavuz, B. Cui, Bowtie nano-antenna with single digit nanometer gap for surface enhanced Raman scattering (SERS), Plasmonics (Springer, IF=2.34), 10, 2015, 831 - 837
  • Irannejad, Mehrdad and Yavuz, Mustafa and Cui, Bo, Finite difference time domain study of light transmission through multihole nanostructures in metallic film, Photonics Research, 1(4), 2013, 154 - 159

Graduate Studies