Access Fees

The Quantum-Nano Fabrication and Characterization Facility (QNFCF) operates on a Core Research Facility model where our members can access shared equipment and are invoiced lab fees to partially defray the lab's cost of operations.  The following fees are charged for accessing the QNFCF.

1. Onboarding fee:  New registrants wishing to access the QNC cleanroom will be charged a one time registration fee of $200.
2. Equipment use fees:  Equipment use (as measured by NEMO enable time) generates an equipment use fee as outlined in the table below.
3. Per-enable fee:  A "per-enable" fee of $1.84 for academic member ($5.52 for industrial members) is levied at every new tool enable in NEMO.  This is intended to defray the cost of consumables such as gloves, cleanroom suits and cleanroom wipes.
4. Training fees:  All training in the QNFCF is staff led and generates a surcharge above the normal equipment use fee.  This surcharge is $25/hour for academic members and $75/hour for industrial members.  This fee is intended to partially defray the cost of staff labour.
5. Staff support fees:  When a QNFCF staff member is performing work on behalf of a researcher this generates a surcharge above the normal equipment use fee.  This surcharge is $50/hour for academic members and $150/hour for industrial members.  This fee is intended to completely defray the cost of staff labour.
6. Inventory fees:  The QNFCF maintains a stock of commonly used items and other material that are not economically feasible for individual members to purchase from suppliers themselves.  A partial list of these items is below with prices listed in NEMO.  Prices change regularly with inflation and exchange rate variations.  The QNFCF endeavours to provide these items to all members on a cost neutral basis.

• AFM probes:
  • ScanAsyst-Air
• Containers:
  • 125 x 65 mm PYREX crystallisation dish
  • 1" wafer holder
  • 2" wafer holder
  • 3" wafer holder
  • 4" wafer holder
  • 4" wafer holder (black polypropylene)
  • 6" wafer holder
  • 400ml pyrex beakers
  • Acid kit
  • Additional cleanroom notebook
  • Beaker box
  • Beaker kit
  • 1" x 1" Gel-box (black conductive)
  • 100 mm glass petri dish
  • large polystyrene petri dish
  • small polystyrene petri dish
  • small polystyrene petri dish - sectioned
  • Nalgene bottle (250 ml)
  • Nalgene bottle (500 ml)
  • Nalgene bottle (1 L)
  • Nalgene bottle (2 L)
  • 10 ml glass photoresist syringe
  • Tweezer box
  • PTFE chip carrier (for chemical processing)
• Lapping supplies
  • Diamond lapping films
  • Red cloth disk
• Evaporation and sputter precious metals
  • Ag pellets
  • Au pellets
  • Pd pellets
  • Pt pellets
  • Au sputter target (sold by deposition time)
  • Pt sputter target (sold by deposition time)
• Metrology supplies
  • Compact TEM grid box
  • Reverse tweezers (fine)
  • Sample membrane box
  • TEM grids
• Resist
  • ZEP520A Electron beam resist
• Service charge
  • Shipping and handling of samples
• Cleanroom tools
  • 2A PEEK replacement tweezer tips
  • PEEK rounded tip tweezers
  • 4" wafer tweezers (ESD safe)
  • 4" wafer tweezer replacement tips
• Wafers
  • 3" prime CZ <100> Silicon
  • 4" prime CZ <100> Silicon
  • 6" prime CZ <100> Silicon
  • 100mm borofloat 33 glass DSP wafer